Non-Volatile Memory Embedded In A Conventional Logic Process And Methods For Operating Same

ABSTRACT

A non-volatile memory system including an array of cells, each having an access transistor and a capacitor sharing a floating gate. The access transistors in each row are fabricated in separate well regions, which are independently biased. Within each row, the source of each access transistor is coupled to a corresponding virtual ground line, and each capacitor structure is coupled to a corresponding word line. Alternately, the source of each access transistor in a column is coupled to a corresponding virtual ground line. Within each column, the drain of each access transistor is coupled to a corresponding bit line. Select memory cells in each row are programmed by band-to-band tunneling. Bit line biasing prevents programming of non-selected cells of the row. Programming is prevented in non-selected rows by controlling the well region voltages of these rows. Sector erase operations are implemented by Fowler-Nordheim tunneling.

RELATED APPLICATIONS

This is a continuation in part of U.S. patent application Ser. No.11/341,881-2960 “Method To Increase Charge Retention Of Non-VolatileMemory Manufactured In A Single-Gate Logic Process” by Gang-feng Fang,Wingyu Leung, and Dennis Sinitsky.

FIELD OF THE INVENTION

The present invention relates to non-volatile memory (NVM). Moreparticularly, this invention relates to non-volatile memory cellsfabricated using an application specific integrated circuit (ASIC) orconventional logic process. This invention further relates to a methodof operating a non-volatile memory to ensure maximum data retentiontime. The invention also relates to a system-on-chip (SoC) architecturewhich includes both non-volatile memory and dynamic random access memory(DRAM) that operates like static random access memory (SRAM), whereinthe SoC is fabricated using a conventional logic process.

RELATED ART

For system-on-chip (SoC) applications, it is desirable to integrate manyfunctional blocks into a single integrated circuit. The most commonlyused blocks include a microprocessor or micro-controller, memory blocks,blocks, and various functional logic blocks, all of which are fabricatedon the same chip. The memory blocks can include any combination ofvolatile random access memory (SRAM), non-volatile memory and/orregister-based memory. The register-based memory is typically used wherea small amount of high speed storage is required (e.g., for registerfiles and/or small tables to be used by one or more functional logicblocks within the SoC).

Larger volatile or non-volatile memory blocks are also typicallyrequired in SoC designs. It is advantageous to keep the layout area ofthese larger memory blocks as small as possible. It is thereforedesirable to use small memory structures to implement the required largememory blocks. If the larger memory block is to be a volatile memory,the choices are typically six-transistor SRAM memory cells or dynamicmemory cells, which must be refreshed. The refresh function imposesunnecessary constraints on the functional logic blocks in the SoC. Onesolution to overcome these constraints is to use a one-transistor SRAM(1T-SRAM) system, which implements dynamic memory cells with anSRAM-type interface so the refresh function is not required (oravailable) at the memory interface. A 1T-SRAM system can be fabricatedusing a conventional logic process. Fabrication and operation of a1T-SRAM system and the associated hidden refresh mechanisms aredisclosed in U.S. Pat. Nos. 6,256,248, 6,898,140, 6,415,353, 6,449,685and 6,504,780 which are hereby incorporated by reference in theirentirety.

If a large non-volatile memory block is also required, it would beadvantageous to be able to use the same process for fabricating thefunctional logic blocks, 1T-SRAM system and the non-volatile memoryblock to realize a low cost SoC. It would further be desirable if all ofthese elements could be fabricated using a conventional logic process.However, traditional processes for fabricating non-volatile memory,which typically use stacked gate or split-gate memory cells, are notcompatible with a conventional logic process.

One example of a split-gate EEPROM is described in “Analysis of theEnhanced Hot-Electron Injection in Split-Gate Transistors Useful forEEPROM Applications”, by J. V. Houdt, P. Heremans, L. Deferm, G.Groeseneken and H. E. Maes, in IEEE Transaction on Electron Devices,Vol. 39, No. 5, May 1992, pp. 1150-1156. An example of a stack-gateFlash memory is described in “A 3.3V single-Power-Supply 64 Mb FlashMemory with Dynamic Bit-Line Latch (DBL) Programming Scheme,” by T.Takeshima, H. Sugawara, H. Takada, Y. Hisamune, K. Kanamori, T. Okazawa,T. Murotani, I. Sasaki, ISSCC Digest, 1994, pp. 148-149.

As used herein, a conventional logic process is defined as asemiconductor process that uses a single layer of polysilicon (i.e., asingle conductive gate layer), without the addition of material in thegate-oxide. Prior art embedded non-volatile semiconductor memory cellsinclude those described in U.S. Pat. No. 6,803,299 B2, “Non-volatileElectrically Erasable and Programmable Semiconductor Memory CellUtilizing Asymmetrical Charge Trapping”, by B. Eitan; and U.S. Pat. No.5,940,324, “Single-Poly EEPROM Cell That is Programmable And Erasable ina Low-Voltage Environment”, by M. H. Chi et al. In U.S. Pat. No.6,803,299 B2, a charge trapping layer using silicon nitride orpoly-silicon is embedded in the gate oxide of the cell transistor.However, this charge trapping layer is not generally available in anASIC or logic process, nor is it incorporated in transistors used forlogic gates. Therefore, the process steps of embedded a trapping layerinto the gate oxide of the transistor have to be added to the basiclogic process in order to facilitate the formation of this NVM cell.

In U.S. Pat. No. 5,940,324, a single-poly EEPROM cell, which includes aMOS transistor and a MOS structure, is described. The formation of thememory cell requires a triple-well logic process with additional processsteps to form a base region.

An example of a conventional Flash memory embedded in a logic processwithout additional masking steps is described in “CMOS ProcessCompatible ie—Flash Technology for System-on-a-chip”, by S. Shukuri etal., Digest of IEEE Custom Integrated Circuit Conference, 2001, pp.179-182. The basic memory cell in this scheme consists of two NMOS andone PMOS transistors, thereby making this a relatively large cell (whencompared with a two transistor cell).

Due to process, temperature and supply voltage variations during programand erase, non-volatile memory cells can be subject to an over-programand over-erase condition. Over-erase or over-programming causes thethreshold voltage of the cell transistor to have a value outside thetargeted operating range and may result in functional failure of thememory device. More importantly, due to process variation and defects,some of the memory cells in a memory array can be programmed or erasedmuch faster or slower than the other memory cells. The over-erase orover-program problem in electrically erasable and programmable memory(EEPROM), where memory cells are erased and programmed individually, caneasily be avoided by monitoring the cell current during program or eraseoperations. The monitoring provides feedback to the circuitrycontrolling the erase or program operation. During a program or eraseoperation, the selected cell current is monitored. When the currentreaches the targeted level, the program or erase operation is stopped,thus avoiding the over-erase or over-program problem. However, in Flashmemory, where a block of memory cells are erased simultaneously,monitoring individual cell currents during erase may be too timeconsuming to be practical.

Over-erased cells in a flash memory array may cause read failures in thearray. For example, erase operations may be carried out using aband-to-band tunneling mechanism to inject electrons into the floatinggate of a non-volatile memory cell, and program operations may becarried out using a Fowler-Nordheim tunneling mechanism to removeelectrons from the floating gate of the non-volatile memory cell. If toomany electrons are injected into the floating gate of a PMOS accesstransistor of a non-volatile memory cell during an erase operation (as aresult of the difficult to control band-to-band tunneling mechanism),the threshold voltage of the PMOS access transistor will increase to anundesirable level (i.e., the PMOS access transistor will becomeundesirably conductive). If the number of electrons injected into thefloating gate (by band-to-band tunneling) during an erase operation issignificantly larger than the number of electrons that can be removedfrom the floating gate (by Fowler-Nordheim tunneling) during asubsequent program operation, an over-erase condition will exist,wherein excess electrons remain in the floating gate after a programoperation is complete. The over-erase condition may eventually get tothe point where programming is no longer possible (within practicallimits). Under these over-erase conditions, the PMOS access transistorof the non-volatile memory cell will exhibit a conductive (erased)state, even if the cell should have a non-conductive (programmed) state.Thus, read operations to an over-erased non-volatile memory cell (aswell as read operations to adjacent non-volatile cells in the samearray) will produce erratic and invalid results. The over-erasecondition will eventually lead to device failure.

It would therefore be desirable to implement a single-polysiliconnon-volatile memory cell using a conventional logic process, where thepossibility of over-erase conditions are minimized, and the detection ofover-erase conditions is simplified. It would also be advantageous to beable to program and read the non-volatile memory cell while minimizingdisturbances from write, erase and read operations, thereby improvingthe life and reliability of an array fabricated using the non-volatilememory cell. It is further desirable for such a memory cell to have aminimum layout area, and be able to retain sufficient charge for 20years or longer.

SUMMARY

Accordingly, the present invention includes an array of non-volatilememory cells fabricated in a conventional logic process. As used herein,a conventional logic process is defined as a process that includes onlyone gate (polysilicon) layer. Each non-volatile memory cell in the arrayincludes an access transistor and a capacitor structure that share agate oxide layer commonly available in the conventional logic process.In order for the non-volatile memory cell to be able to retainsufficient charge for 20 years or longer, the gate oxide must have athickness of 70 Angstroms or thicker. In deep sub-micron processes suchas a conventional 0.13 um logic process, the logic transistors have anoxide thickness of about 20 Angstroms, which is much less than therequired 70 Angstroms. However, in order for any silicon device tocommunicate with a standard 3.3V interface, a set of 3.3 Voltinput/output (I/O) transistors are typically made available in most ofthe conventional deep sub-micron logic processes. In order to toleratethe 3.3 Volt supply, these I/O transistors are usually built with agate-oxide thickness of 70 Angstroms. Therefore, it is possible to buildthe non-volatile memory cells of the present invention with a gate oxideof 70 Angstroms, without modifying these logic processes.

The non-volatile memory cells can be programmed and erased usingrelatively low voltages, which are generated from the available powersupply voltages. As a result, the voltages required to program and erasethe non-volatile memory cells can be provided by transistors readilyavailable in a conventional logic process having 3.3 Volt I/Otransistors.

The non-volatile memory cell array can be laid out in differentconfigurations and be biased in different manners in the variousembodiments. In one embodiment, each non-volatile memory cell of thearray includes a PMOS access transistor and an NMOS capacitor structure,which share a common floating gate. The PMOS access transistorsassociated with each row of the array are fabricated in a correspondingisolated n-well region. Each isolated n-well region is biased by aseparate control voltage. The drains of the PMOS access transistorsassociated with each column of the array are connected by acorresponding bit line. The floating gates of the non-volatile memorycells in each row of the array are coupled to a corresponding word line.This configuration allows the memory cells to be programmed in a randomper bit manner using a band-to-band tunneling mechanism to injectelectrons into the desired floating gates. During programming, thecurrent through each of the programmed memory cells is monitoredindividually so as to avoid the over-program problem. This configurationalso allows the memory cells to be erased using a Fowler-Nordheimtunneling mechanism to simultaneously remove electrons from the floatinggates of all memory cells in a sector. Using Fowler-Nordheim tunnelingto remove electrons from the floating gates has the advantage that theprocess is self-limiting. This self-limitation minimizes the probabilityof over-erasing the memory cells.

The non-volatile memory of the present invention can be included in asystem-on-a-chip (SoC) architecture, along with dynamic memoryconfigured to implement one-transistor static random access memory(1T-SRAM) with hidden refresh and other logic functions. The SoC can befabricated using a conventional logic process to realize a highlyoptimized SoC produced at a low cost.

The present invention will be more fully understood in view of thefollowing description and drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a top view of a non-volatile memory cell having a PMOS accesstransistor and an NMOS coupling gate.

FIG. 2A is a cross-sectional view of the non-volatile memory cell ofFIG. 1 along section line A-A.

FIG. 2B is a cross-sectional view of the non-volatile memory cell ofFIG. 1 along section line B-B.

FIG. 3 is a schematic diagram of a 2×2 array of non-volatile memorycells, in accordance with one embodiment of the present invention.

FIGS. 4A, 4B and 4C are tables that define program, erase and readoperations, respectively, of the array of FIG. 3 in accordance with oneembodiment of the present invention.

FIG. 5 is a circuit diagram of a 2×2 array of non-volatile memory cellsin accordance with another embodiment of the present invention.

FIG. 6 is a top layout view of a non-volatile memory cell that can befabricated using a conventional logic process, in accordance withanother embodiment of the present invention.

FIG. 7A is a cross-sectional view of the non-volatile memory cell ofFIG. 6 along section line A′-A′.

FIG. 7B is a cross-sectional view of the non-volatile memory cell ofFIG. 6 along section line B′-B′.

FIG. 8 is a schematic diagram of a 2×2 array of non-volatile memorycells in accordance with another embodiment of the present invention.

FIGS. 9A, 9B and 9C are tables that define program, erase and readoperations of the array of FIG. 8 in accordance with one embodiment ofthe present invention.

FIG. 10 is a table that defines the bias voltages used to erase thenon-volatile memory cells of the array of FIG. 8 in accordance with analternate embodiment of the present invention.

DETAILED DESCRIPTION

FIG. 1 is a top layout view of a non-volatile memory cell 100 that canbe fabricated using a conventional logic process. FIG. 2A is across-sectional view of non-volatile memory cell 100 along section lineA-A. FIG. 2B is a cross-sectional view of non-volatile memory cell 100along section line B-B. The structure and fabrication of non-volatilememory cell 100 is largely described in commonly-owned U.S. Pat. No.6,512,691 to Hsu et al., which is hereby incorporated by reference inits entirety.

Non-volatile memory cell 100 is fabricated in a p-type monocrystallinesemiconductor substrate 101 (e.g., silicon). Non-volatile memory cell100 includes a PMOS access transistor 110, having a p-type source 111and a p-type drain 112 fabricated in an n-well region NW₀. Source region111 includes lightly doped source 111A and p+ source contact region111B. Drain region 112 includes lightly doped drain 112A and p+ draincontact region 112B. A channel region 113 is located between source anddrain regions 111-112. Source region 111 is connected to avirtual-ground (VG) line and drain region 112 is connected to a bit line(BL). Planarized field oxide 114 is located around the source, drain andchannel regions of PMOS access transistor 110. A gate oxide layer 115 islocated over the channel region 113. This gate oxide layer 115 has thesame thickness as the gate oxide layers used in conventionalinput/output (I/O) transistors (not shown) fabricated in substrate 101.To maintain a data retention time of 20 years, the gate oxide thicknessof gate oxide layer 115 is generally required to be 70 Angstroms orthicker. For conventional logic processes with feature sizes of lessthan 0.35 um, the logic transistors have an oxide thickness less than 70Angstroms. However, most conventional deep sub-micron logic processesfeature input/output (I/O) transistors with an oxide thickness greaterthan or equal to 70 Angstroms, such that these I/O transistors are notdamaged by standard I/O voltages of 3.3 Volts or higher. The thickeroxide used to fabricate the I/O transistors is also used to form gateoxide layer 115, thereby enabling the non-volatile memory cell 100 tomeet the 20 year data retention period. A conductively dopedpolycrystalline silicon floating gate 116 is located over gate oxidelayer 115. Sidewall spacers 117, which are typically formed from siliconnitride or silicon oxide, are located at the lateral edges of floatinggate 116.

Floating gate 116 and gate oxide layer 115 extend laterally beyond PMOSaccess transistor 110 over p-type substrate 101 and n-type couplingregion 121. N-type coupling region 121 is coupled to n+ word linecontact region 122. N+ word line contact region 122, in turn, is coupledto a word line (WL). The n-type coupling region 121 and n+ word linecontact region 122 are formed by the n-type source/drain implants of aconventional logic process, thereby eliminating the need for anyadditional implants not normally provided by the conventional logicprocess. N-type regions 121-122, gate oxide layer 115 and floating gate116 form an NMOS capacitor structure 120. NMOS capacitor structure 120couples word line WL to floating gate 116. The total couplingcapacitance of NMOS capacitor structure 120 is significantly larger than(e.g., 4×) the gate capacitance of PMOS access transistor 110.Non-volatile memory cell 100 can be fabricated using a conventionallogic process, without any process modifications or special implants.

As described in U.S. Pat. No. 6,512,691, non-volatile memory cell 100 iserased on a per-sector basis by a band-to-band tunneling mechanism,wherein electrons are injected into the floating gate 116. U.S. Pat. No.6,512,691 indicates that memory cell 100 is programmed usingFowler-Nordheim (FN) tunneling, wherein electrons are removed fromfloating gate 116. However, operating memory cell 100 in this manner mayresult in over-erase conditions. The present invention thereforeprovides an improved method of operating non-volatile memory cell 100 inan array.

FIG. 3 is a schematic diagram of a 2×2 array 301 of non-volatile memorycells 100, 200, 300 and 400, in accordance with one embodiment of thepresent invention. Non-volatile memory cells 200, 300 and 400 areidentical to above-described non-volatile memory cell 100. Thus,non-volatile memory cells 200, 300 and 400 include PMOS accesstransistors 210, 310 and 410, respectively, and NMOS capacitorstructures 220, 320 and 420, respectively. Non-volatile memory cells 100and 200 are fabricated in a first n-well region NW₀, and non-volatilememory cells 300 and 400 are fabricated in a separate n-well region NW₁,which is isolated from n-well region NW₀. The sources of PMOS accesstransistors 110 and 210 are commonly connected to a first virtual groundline VG₀. Similarly, the sources of access transistors 310 and 410 arecommonly connected to a second virtual ground line VG₁. The drains ofPMOS access transistors 110 and 310 are commonly connected to a firstbit line BL₀. Similarly, the drains of PMOS access transistors 210 and410 are commonly connected to a second bit line BL₁. NMOS capacitorstructures 120 and 220 are commonly connected to a first word line WL₀.Similarly, NMOS capacitor structures 320 and 420 are commonly connectedto a second word line WL₁. Although the described array has two rows andtwo columns, it is understood that arrays having other sizes can beimplemented by one of ordinary skill in the art. In general, each row ofPMOS access transistors is fabricated in a corresponding isolated n-wellregion.

As shown in FIG. 3, the virtual ground lines VG₁-VG₁, n-well regionsNW₀-NW₁ and word lines WL₀-WL₁ are routed in parallel along a first axisand bit lines BL₀-BL₁ are routed in parallel along a second axis,perpendicular to the first axis. Consequently, only one of the n-wellregions NW₀-NW₁ and one of the bit lines BL₀-BL₁ intersect within eachof non-volatile memory cells 100, 200, 300 and 400. As described below,this configuration allows a band-to-band tunneling mechanism to be usedto implement a random bit program operation.

FIGS. 4A, 4B and 4C illustrate tables 401, 402 and 403, respectively,which define program, erase and read operations of the array 301 of FIG.3 in accordance with one embodiment of the present invention. Asdescribed in more detail below, over-erase conditions are avoided inthis embodiment.

The programming mode is described in connection with the programming ofnon-volatile memory cell 100. In the programming mode, electrons areinjected into the floating gate of the cell to be programmed. As aresult, the PMOS threshold voltage (V_(tp)) of the programmed cell isless negative (lowered) and therefore conducts more current duringnormal read operations. The programming mode is implemented by aband-to-band hot electron injection mechanism through the gate oxidelayer 115 of PMOS access transistor 110. The programming process alsoincludes a read operation, which is performed after electrons have beeninjected into the floating gate. During the write operation, a shortprogramming pulse is applied to the memory cell 100. A read operation isthen performed to effectively measure the current of PMOS accesstransistor 110. This technique is commonly employed in semiconductornon-volatile memories and is therefore not discussed further.

Non-volatile memory cell 100 is programmed as follows. Word line WL₀ isheld at a voltage of 5 Volts, while bit line BL₀ is held at a voltage of−2.5 v and virtual ground lines VG₀ and VG₁ are each held at a voltageof 0 Volts. N-well region NW₀ is held at a voltage of 2.5 Volts, andp-type substrate is held at a voltage of 0 Volts. Under these biasconditions, NMOS capacitor structure 120 and PMOS access transistor 110are placed in an accumulation mode. A relatively high voltage dropexists across the p-type drain region 112 (−2.5 Volts) of PMOS accesstransistor 110 and n-well region NW₀ (2.5 Volts) Relatively high voltagedrops also exist between floating gate 115 (5 Volts) and the p-typesource/drain regions 111 and 112 of PMOS access transistor 110 (0 Voltsand '2.5 Volts). The resulting high electrical field conditions causeband-to-band tunneling to occur near the edges of p-type source/drainregions 111-112, wherein the resulting channel hot-electrons (CHE) areaccelerated and injected into floating gate 116.

In the present example, non-volatile memory cell 200 is also selected bythe 5 Volt signal applied to word line WL₀. However, in the describedexample, it is not desired to program non-volatile memory cell 200. Toprevent electrons from being injected into the floating gate ofnon-volatile memory cell 200, bit line BL₁ and virtual ground line VG₀are both held at a voltage of 0 Volts. Under these conditions, thevoltage drop across the drain/gate overlap oxide region of PMOS accesstransistor 210 is substantially less (˜5 Volts) than the drain/gatevoltage drop of p-channel access transistor 110 (˜7.5 Volts). Inaddition, the drain/n-well junction voltage drop of p-channel accesstransistor 210 (˜2.5 Volts) is substantially smaller than the voltagerequired to induce band-to-band tunneling in this junction (e.g., ˜5Volts).

In the second row, non-volatile memory cell 300 receives the −2.5 Voltsignal provided on bit line BL₀. However, a voltage of 0 Volts isapplied to the n-well region NW₁ of the second row. Thus, thedrain/n-well junction voltage drop is only 2.5 Volts in p-channel accesstransistor 310 (compared with 5 Volts in p-channel access transistor110). Additionally, a voltage of 2.5 Volts is applied to word line WL₁,(compared with 5 Volts applied to word line WL₀). Under these lowervoltage conditions, electron injection into the floating gate ofnon-volatile memory cell 300 is suppressed.

Finally, non-volatile memory cell 400 receives the word line voltage WL₁of 2.5 Volts, the bit line voltage BL₁ of 0 Volts, the virtual groundline voltage VG₁ of 0 Volts and the n-well voltage NW₁ of 0 Volts. As aresult, there is a 0 Volt voltage drop across the drain region andn-well region of p-channel access transistor 410, and a 2.5 Volt dropacross the drain region and word line of p-channel access transistor410. Under these conditions, electron injection into the floating gateof non-volatile memory cell 400 is suppressed.

Note that it is necessary to keep any unselected word lines (e.g., WL₁)at a voltage greater than 0 Volts (e.g., about 2.5 Volts), in order tosuppress leakage through any already-programmed cells in the unselectedrows during a program operation.

Because the program operation is performed using a band-to-bandtunneling mechanism, the number of non-volatile memory cells subject tothe injection of an excessive amount of electrons is advantageouslyminimized.

In the erase mode, electrons are removed from the floating gates ofmemory cells 100, 200, 300 and 400, thereby making the threshold voltage(Vtp) of PMOS access transistors 110, 210, 310 and 410 less positive (ormore negative). As a result of the more negative threshold voltages, theerased PMOS access transistors are turned off during normal readoperations. The sector erase operation utilizes direct and/orFowler-Nordheim tunneling mechanisms to remove electrons from thefloating gates through the gate oxide layers of the PMOS accesstransistors.

The erase mode is defined in more detail in table 402 of FIG. 4B. In theerase mode, word lines WL₀ and WL₁ are held at 0 Volts, and bit linesBL₀-BL₁ and virtual ground lines VG₀-VG₁ are held at 10 Volts. Then-well regions NW₀ and NW₁ are also held at 10 volts. P-type substrate101 is held at 0 Volts. Under these bias conditions, the floating gatesof memory cells 100, 200, 300 and 400 are coupled to a voltage slightlyhigher than 0 Volts. As a result, NMOS capacitor structures 120, 220,320 and 420 and PMOS access transistors 110, 210, 310 and 410 are placedin an inversion mode. A relatively high voltage drop exists across thegate oxide regions of the PMOS access transistors 110, 210, 310 and 410,wherein the electric field exceeds 10 mega-Volts per centimeter (MV/cm).Under these conditions, electrons tunnel out of the respective floatinggates. Because the erase operation is performed using a Fowler-Nordheimtunneling mechanism, the erase operation can be precisely controlled bycontrolling the erase bias voltages.

More specifically, in Fowler-Nordheim tunneling, the mechanism iscontrolled by the gate-to-N-well voltage only. More precisely, thetunneling mechanism depends on the net voltage across the oxide of thePMOS access transistor, which is approximately equal to thegate-to-N-well voltage minus the threshold voltage (V_(T)) of the PMOSaccess transistor. As more electrons removes from the floating gate, thethreshold voltage V_(T) of the PMOS access transistor increases and thenet voltage across the gate oxide decreases. The decrease of the oxidevoltage decreases the rate of electrons tunneling through the oxide.Thus, using a Fowler-Nordheim mechanism to remove electrons from thefloating gate is a self-limiting process in this embodiment. Theself-liming process minimizes the possibility of over-erase. Suchself-limitation mechanism is absent in band-to-band tunneling. Inaddition, the band-to-band tunneling rate is controlled by two voltagepotentials: the drain-to-N-well voltage and drain-to-gate voltage. Thus,the amount of electrons entering the gate is more difficult to controlwith a band-to-band tunneling mechanism.

The read mode is defined in more detail in table 403 of FIG. 4C. Inorder to read non-volatile memory cells 100 and 200 in the same row,word line WL₀ is held at 0 Volts, virtual ground line VG₀ is held at 1.2Volts, bit lines BL₀ and BL₁ are held at 0 volts, n-well region NW₀ isheld at 1.2 Volts, and p-type substrate 101 is held at 0 Volts. Underthese conditions, read current will flow through the p-channel accesstransistors of programmed cells of the row, while read current will beless through the PMOS access transistors of non-programmed (erased)cells of the row.

The word line WL₁ associated with the non-selected row of cells is heldat 2.5 Volts in the normal read mode, thereby turning off PMOS accesstransistors 310 and 410. Turning off PMOS access transistors 310 and 410prevents current from flowing through these transistors into bit linesBL₀ and BL₁. As a result, non-volatile memory cells 300 and 400 do notinterfere with the bit line signals from the selected non-volatilememory cells 100 and 200.

FIG. 5 is a circuit diagram of a 2×2 array 501 in accordance withanother embodiment of the present invention. The difference betweenarray 501 and array 301 is that the bit lines (BL) and virtual groundlines (VG) are routed in same direction in array 501, perpendicular tothe direction of the n-well regions (NW) and word lines (WL). Array 501is programmed and erased using the same bias voltages set forth intables 401 and 402 of FIGS. 4A and 4B. Under these bias conditions,program operations implement band-to-band tunneling and erase operationsimplement Fowler-Nordheim tunneling in the manner described above inconnection with array 301. Array 501 is read in substantially the samemanner as array 301, except that all virtual ground lines VG₀ and VG₁are held at 1.2 Volts in array 501 (such that the source regions of allof memory cells in the read row are biased at 1.2 Volts).

FIG. 6 is a top layout view of a non-volatile memory cell 600 that canbe fabricated using a conventional logic process, in accordance withanother embodiment of the present invention. FIG. 7A is across-sectional view of non-volatile memory cell 600 along section lineA′-A′. FIG. 7B is a cross-sectional view of non-volatile memory cell 600along section line B′-B′.

The layout of non-volatile memory cell 600 is similar to the layout ofnon-volatile memory cell 100, wherein the polarities of the varioussemiconductor regions are reversed in non-volatile memory cell 600.Thus, non-volatile memory cell 600 is fabricated in a deep n-well (DNW)region 602 (which is located in a p-type semiconductor substrate 601).Non-volatile memory cell 600 includes an NMOS access transistor 610,having an n-type source 611 and an n-type drain 612 fabricated in ap-well region PW₀. Source region 611 includes lightly doped source 611Aand n+ source contact region 611B. Drain region 612 includes lightlydoped drain 612A and n+ drain contact region 612B. A channel region 613is located between source and drain regions 611-612. Source region 611is connected to a virtual-ground (VG) line and drain region 612 isconnected to a bit line (BL). Planarized field oxide 614 is locatedaround the active regions of NMOS access transistor 610. A gate oxidelayer 615 is located over the channel region 613. This gate oxide layer615 has the same thickness as the gate oxide layers used in conventionalI/O transistors (not shown) fabricated in substrate 601. In thedescribed embodiment, gate oxide layer 615 has a thickness of 70Angstroms or thicker, thereby enabling a data retention period of 20years. A conductively doped polycrystalline silicon floating gate 616 islocated over gate oxide layer 615. Sidewall spacers 617 are located atthe lateral edges of floating gate 616.

Non-volatile memory cell 600 also includes PMOS capacitor element 620,which includes p-type coupling region 621 and p+ word-line contactregion 622. The total coupling capacitance of PMOS capacitor structure620 is significantly larger than (e.g., 4×) the gate capacitance of NMOSaccess transistor 610. Non-volatile memory cell 600 can be fabricatedusing a conventional logic process having I/O devices with a gate oxideof 70 Angstroms or thicker, without any process modifications or specialimplants.

FIG. 8 is a schematic diagram of a 2×2 array 801 of non-volatile memorycells 600, 700, 800 and 900 in accordance with another embodiment of thepresent invention. Non-volatile memory cells 700, 800 and 900 areidentical to above-described non-volatile memory cell 600. Thus,non-volatile memory cells 700, 800 and 900 include NMOS accesstransistors 710, 810 and 910, respectively, and PMOS capacitorstructures 720, 820 and 920, respectively. The configuration of array801 is similar to the configuration of array 301 (FIG. 3). Thus, NMOSaccess transistors 610 and 710 are fabricated in a first p-well regionPW₀, and NMOS access transistors 810 and 910 are fabricated in aseparate p-well region PW₁, which is isolated from p-well region PW₀.The sources of NMOS access transistors 610 and 710 are commonlyconnected to a first virtual ground line VG₀. Similarly, the sources ofaccess transistors 810 and 910 are commonly connected to a secondvirtual ground line VG₁. The drains of NMOS access transistors 610 and810 are commonly connected to a first bit line BL₀. Similarly, thedrains of NMOS access transistors 710 and 910 are commonly connected toa second bit line BL₁. PMOS capacitor structures 620 and 720 arecommonly connected to a first word line WL₀. Similarly, PMOS capacitorstructures 820 and 920 are commonly connected to a second word line WL₁.Although the described array has two rows and two columns, it isunderstood that arrays having other sizes can be implemented by one ofordinary skill in the art. In general, each row of NMOS accesstransistors is fabricated in a corresponding isolated p-well region.

Within array 801, the virtual ground lines VG₀-VG₁, p-well regionsPW₀-PW₁ and word lines WL₀-WL₁ are routed in parallel along a first axisand bit lines BL₀-BL₁ are routed in parallel along a second axis,perpendicular to the first axis. Only one of the p-well regions PW₀-PW₁and one of the bit lines BL₀-BL₁ intersect within each of NVM cells 600,700, 800 and 900. As described below, this configuration allows aband-to-band tunneling mechanism to be used to implement a random bitprogram operation.

FIGS. 9A, 9B and 9C illustrate tables 901, 902 and 903, respectively,which define program, erase and read operations of the array 801 of FIG.8 in accordance with one embodiment of the present invention. Asdescribed in more detail below, over-erase conditions are avoided inthis embodiment.

The programming mode is described in connection with the programming ofnon-volatile memory cell 600. In the programming mode, hot holes areinjected into the floating gate of the cell to be programmed. As aresult, the NMOS threshold voltage (V_(tn)) of the programmed cell isless positive (lowered) and therefore conducts more current duringnormal read operations. The programming mode is implemented by aband-to-band hot hole injection mechanism through the gate oxide layer615 of NMOS access transistor 610.

Non-volatile memory cell 600 is programmed as follows. Word line WL₀ isheld at a voltage of −3 Volts, while bit line BL₀ is held at a voltageof 5 Volts and virtual ground lines VG₀ and VG₁ are each held at avoltage of 0 Volts. P-well region PW₀ is held at a voltage of 0 Volts,deep n-well 602 is held at a voltage of 2.5 Volts, and p-type substrateis held at a voltage of 0 Volts. Under these bias conditions, PMOScapacitor structure 620 and NMOS access transistor 610 are placed in anaccumulation mode. A relatively high voltage drop exists across then-type drain region 612 (5 Volts) of NMOS access transistor 610 andp-well region PW₀ (0 Volts). A relatively high voltage drop also existsbetween floating gate 615 (−3 Volts) and the n-type drain region 612 ofNMOS access transistor 610 (5 Volts). The resulting high electricalfield conditions cause band-to-band tunneling to occur near the edge ofn-type source/drain regions 611-612, and the resulting channel hot-holes(CHH) are accelerated and injected into floating gate 616.

In the present example, non-volatile memory cell 700 is also selected bythe −3 Volt signal applied to word line WL₀. However, in the describedexample, it is not desired to program non-volatile memory cell 700. Toprevent holes from being injected into the floating gate of non-volatilememory cell 700, bit line BL₁ and virtual ground line VG₀ are both heldat a voltage of 0 Volts. Under these conditions, the voltage drop acrossthe drain/gate overlap oxide region of NMOS access transistor 710 issubstantially less (˜3 Volts) than the drain/gate voltage drop ofp-channel access transistor 610 (˜8 Volts). In addition, thedrain/p-well junction voltage drop of n-channel access transistor 710(˜0 Volts) is substantially smaller than the voltage required to induceband-to-band tunneling in this junction.

In the second row, non-volatile memory cell 800 receives the 5 Voltsignal provided on bit line BL₀. However, a voltage of 2.5 Volts isapplied to the p-well region PW₁ of the second row. Thus, thedrain/p-well junction voltage drop is only 2.5 Volts in NMOS accesstransistor 810 (compared with 5 Volts in NMOS access transistor 610).Additionally, a voltage of 0 Volts is applied to word line WL₁, suchthat the voltage drop across the drain/gate overlap oxide region of NMOSaccess transistor 810 is substantially less (˜5 Volts) than thedrain/gate voltage drop of p-channel access transistor 610 (˜8 Volts).Under these lower voltage conditions, hole injection into the floatinggate of non-volatile memory cell 800 is suppressed.

Finally, non-volatile memory cell 900 receives the word line voltage WL₁and the bit line voltage BL₁, each equal to 0 Volts, and the p-wellvoltage PW₁ of 2.5 Volts. As a result, there is a 2.5 Volt voltage dropacross the drain region and p-well region of NMOS access transistor 910.Under these conditions, hole injection into the floating gate ofnon-volatile memory cell 900 is suppressed.

In the erase mode, electrons are injected into the floating gates ofmemory cells 600, 700, 800 and 900, thereby making the threshold voltage(Vtn) of NMOS access transistors 610, 710, 810 and 910 more positive(increased). As a result of the more positive threshold voltages, theerased NMOS access transistors are turned off during normal readoperations. The erase operation utilizes a Fowler-Nordheim tunnelingmechanism to tunnel electrons from the channels of NMOS accesstransistors 610, 710, 810 and 910 into the corresponding floating gatesthrough the associated gate oxide layers of these NMOS accesstransistors.

The erase mode is defined in more detail in table 902 of FIG. 9B. In theerase mode, word lines WL₀ and WL₁ are held at 5 Volts, and bit linesBL₀-BL₁, virtual ground lines VG₀-VG₁ and p-well regions PW₀-PW₁ areheld at −5 Volts. Deep n-well 602 is held at 5 Volts and p-typesubstrate 601 is held at 0 Volts. Under these bias conditions, thefloating gates of memory cells 600, 700, 800 and 900 are coupled to avoltage slightly less than 5 Volts. As a result, PMOS capacitorstructures 620, 720, 820 and 920 and NMOS access transistors 610, 710,810 and 910 are placed in an inversion mode. A relatively high voltagedrop exists across the gate oxide regions of NMOS access transistors610, 710, 810 and 910, wherein the electric field exceeds 10 mega-Voltsper centimeter (MV/cm). Under these conditions, electrons in theinversion channel or source/drain regions of NMOS access transistors610, 710, 810, and 910 tunnel into the respective floating gates.

The read mode is defined in more detail in table 903 of FIG. 9C. Inorder to read non-volatile memory cells 600 and 700 in the same row,word line WL₀ is held at 2.5 Volts, virtual ground line VG₀ is held at1.2 Volts, bit lines BL₀ and BL₁ are held at 0 volts, p-well region PW₀is held at 0 Volts, deep n-well region 602 is held at 2.5 Volts, andp-type substrate 101 is held at 0 Volts. Under these conditions, readcurrent will flow through the NMOS access transistors of programmedcells of the row, while read current will be less through the NMOSaccess transistors of non-programmed (erased) cells of the row.

The word line WL₁ associated with the non-selected row of cells is heldat 0 Volts in the normal read mode, thereby turning off NMOS accesstransistors 810 and 910. Turning off NMOS access transistors 810 and 910prevents current from flowing through these transistors into bit linesBL₀ and BL₁. As a result, non-volatile memory cells 800 and 900 do notinterfere with the bit line signals from the selected non-volatilememory cells 600 and 700.

FIG. 10 is a table 1001 which defines the bias voltages used to erasethe non-volatile memory cells of array 801 in accordance with analternate embodiment of the present invention. In this alternate erasemode, word lines WL₀ and WL₁, virtual ground lines VG₀ and VG₁, and deepn-well 602 are held at 5 Volts. Bit lines BL₀-BL₁, p-well regionsPW₀-PW₁ and p-type substrate 101 are held at 0 Volts. Under these biasconditions, transistors 610, 710, 810 and 910 are biased in thesaturation region, whereby a strong lateral electrical field existsbetween the channel and the drain region within each of the NMOS accesstransistors 610, 710, 810 and 910. In the charge depletion zone near thedrain region, channel-electrons are accelerated by the high lateralfield. Some of the electrons may acquire a sufficient velocity so as tocause impact ionization. During impact ionization, some of the hotelectrons are scattered when colliding with the semiconductor lattice.Some of the scattered hot electrons may be attracted by the verticalfield and tunnel through the gate oxide and eventually trapped in thefloating gate. Hot electron and impact ionization mechanism are wellknown in the field of device physics. The trapped electrons in thefloating gates increase the threshold voltages of the NMOS accesstransistors 610, 710, 810 and 910. Consequently, the non-volatile memorycells 600, 700, 800 and 900 are erased by channel hot electron injectioncaused by impact ionization.

Although the present invention has been described in connection withseveral embodiments, it is understood that this invention is not limitedto the embodiments disclosed, but is capable of various modificationsand embodiments which would be apparent to one of ordinary skill in theart. It is, therefore, contemplated that the appended claims will coverany such modifications or embodiments as falling within the true scopeof the invention.

1. A non-volatile memory system comprising: an array of non-volatilememory cells arranged in one or more rows and columns, wherein each ofthe non-volatile memory cells includes an access transistor havingsource/drain regions of a first conductivity type and a capacitorstructure having a diffusion region of a second conductivity type,opposite the first conductivity type, wherein the access transistor andcapacitor structure share a common floating gate, and wherein the accesstransistors in each row are fabricated in a dedicated well region of thesecond conductivity type; a first set of control lines, wherein each ofthe control lines in the first set is coupled to the source of eachaccess transistor in a corresponding row; and a second set of controllines, wherein each of the control lines in the second set is coupled tothe drain of each access transistor in a corresponding column.
 2. Thenon-volatile memory system of claim 1, further comprising a well biascontrol circuit configured to independently bias the dedicated wellregions.
 3. The non-volatile memory system of claim 1, wherein the firstset of control lines extend in parallel with the well regions along afirst axis.
 4. The non-volatile memory system of claim 3, wherein thesecond set of control lines extend in parallel along a second axis,perpendicular to the first axis.
 5. The non-volatile memory system ofclaim 1, further comprising a third set of control lines, wherein eachof the control lines in the third set is coupled to the diffusion regionof each capacitor structure in a corresponding row.
 6. The non-volatilememory system of claim 1, further comprising programming means forinducing band-to-band tunneling in selected access transistors in aselected row of the array, thereby programming the non-volatile memorycells that include the selected access transistors.
 7. The non-volatilememory system of claim 6, wherein the programming means furthercomprises means for preventing band-to-band tunneling in non-selectedaccess transistors in the selected row of the array by controlling abias voltage applied to the drains of these non-selected accesstransistors.
 8. The non-volatile memory system of claim 6, wherein theprogramming means further comprises means for preventing band-to-bandtunneling in access transistors in non-selected rows of the array bycontrolling bias voltages applied to the well regions associated withthese non-selected rows.
 9. The non-volatile memory system of claim 6,wherein the programming means is configured to induce the band-to-bandtunneling by controlling the junction voltage between the drain and wellregion of the selected access transistors.
 10. The non-volatile memorysystem of claim 9, wherein the junction voltage is about 5 Volts. 11.The non-volatile memory system of claim 1, further comprising erasemeans for inducing Fowler-Nordheim tunneling in all of the accesstransistors in the array, thereby simultaneously erasing all of thenon-volatile memory cells in the array.
 12. A non-volatile memory systemcomprising: an array of non-volatile memory cells arranged in one ormore rows and columns, wherein each of the non-volatile memory cellsincludes an access transistor having source/drain regions of a firstconductivity type and a capacitor structure having a diffusion region ofa second conductivity type, opposite the first conductivity type,wherein the access transistor and capacitor structure share a commonfloating gate, and wherein the access transistors in each row arefabricated in a dedicated well region of the second conductivity type; afirst set of control lines, wherein each of the control lines in thefirst set is coupled to the source of each access transistor in acorresponding column; and a second set of control lines, wherein each ofthe control lines in the second set is coupled to the drain of eachaccess transistor in a corresponding column.
 13. The non-volatile memorysystem of claim 12, further comprising a well bias control circuitconfigured to independently bias the dedicated well regions.
 14. Thenon-volatile memory system of claim 12, wherein the first set of controllines and the second set of control lines extend in parallel along afirst axis.
 15. The non-volatile memory system of claim 14, wherein thewell regions extend in parallel along a second axis, perpendicular tothe first axis.
 16. The non-volatile memory system of claim 12, furthercomprising a third set of control lines, wherein each of the controllines in the third set is coupled to the diffusion regions of eachcapacitor structure in a corresponding row.
 17. The non-volatile memorysystem of claim 12, further comprising programming means for inducingband-to-band tunneling in selected access transistors in a selected rowof the array, thereby programming the non-volatile memory cellscontaining the selected access transistors.
 18. The non-volatile memorysystem of claim 17, wherein the programming means further comprisesmeans for preventing band-to-band tunneling in non-selected accesstransistors in the selected row of the array by controlling a biasvoltage applied to the drains of these access transistors.
 19. Thenon-volatile memory system of claim 17, wherein the programming meansfurther comprises means for preventing band-to-band tunneling in accesstransistors of non-volatile memory cells in non-selected rows of thearray by controlling the bias voltages applied to the well regions ofthese non-selected rows.
 20. The non-volatile memory system of claim 17,wherein the programming means is configured to induce the band-to-bandtunneling by controlling the junction voltage between the drain and wellregion of the selected access transistors.
 21. The non-volatile memorysystem of claim 20, wherein the junction voltage is about 5 Volts. 22.The non-volatile memory system of claim 12, further comprising erasemeans for inducing Fowler-Nordheim tunneling in all of the accesstransistors of the array, thereby simultaneously erasing all of thenon-volatile memory cells in the array.
 23. A method comprising:programming selected non-volatile memory cells in a selected row of anarray of non-volatile memory cells arranged in one or more rows andcolumns, wherein each of the non-volatile memory cells includes anaccess transistor having source/drain regions of a first conductivitytype and a capacitor structure having a diffusion region of a secondconductivity type, opposite the first conductivity type, and a floatinggate electrode common to the access transistor and the capacitorstructure, and wherein the programming is implemented by band-to-bandtunneling into the floating gate electrodes of the selected non-volatilememory cells; and preventing programming of non-selected non-volatilememory cells in the selected row of the array, wherein the step ofpreventing programming is implemented by controlling a bias voltageapplied to a source/drain region of the access transistor of eachnon-selected non-volatile memory cell in the selected row.
 24. Themethod of claim 23, further comprising: preventing programming ofnon-volatile memory cells in non-selected rows of the array bycontrolling a bias voltage applied to dedicated well regions associatedwith the non-selected rows, wherein the access transistors in each roware fabricated in a corresponding dedicated well region.
 25. The methodof claim 24, wherein the step of preventing programming of non-volatilememory cells in the non-selected rows further comprising controlling abias voltage applied to word lines associated with the non-selectedrows, wherein the diffusion regions of the capacitor structures in eachrow are coupled to a corresponding word line.
 26. The non-volatilememory system of claim 23, further comprising implementing theband-to-band tunneling within each of the selected non-volatile memorycells by controlling a junction voltage between a source/drain region ofeach of the access transistors of the selected non-volatile memory cellsand a well region in which each of the access transistors of theselected non-volatile memory cells is fabricated.
 27. The method ofclaim 26, further comprising biasing the junction voltage at about 5Volts.
 28. The method of claim 23, further comprising simultaneouslyerasing all of the non-volatile memory cells in the array by inducingFowler-Nordheim tunneling in all of the access transistors in the array.29. A non-volatile memory system comprising: a non-volatile memory cellconsisting of an NMOS transistor and a PMOS capacitor sharing a floatinggate; means for injecting electrons into the floating gate using aFowler-Nordheim tunneling mechanism; and means for injecting holes intothe floating gate using a band-to-band tunneling mechanism.
 30. Thenon-volatile memory system of claim 29, wherein the means for injectingelectrons into the floating gate are configured to induce electrons totunnel from a channel of the NMOS transistor into the floating gate. 31.The non-volatile memory system of claim 29, wherein the means forinjecting holes into the floating gate are configured to induce holes totunnel from a drain junction of the NMOS transistor into the floatinggate.
 32. The non-volatile memory system of claim 29, further comprisingone or more input/output transistors, each having a gate oxide layer,wherein the NMOS transistor and PMOS capacitor further include a gateoxide layer having a thickness substantially the same as a thickness ofthe gate oxide layer of the input/output transistors.
 33. Thenon-volatile memory system of claim 32, wherein the non-volatile memorysystem is fabricated with a conventional logic process having one andonly one polysilicon layer, wherein the floating gate is fabricated fromthe polysilicon layer.
 34. A non-volatile memory system comprising: anon-volatile memory cell consisting of an NMOS transistor and a PMOScapacitor sharing a floating gate; means for injecting holes into thefloating gate using a gate assisted band-to-band tunneling mechanism;and means for injecting electrons into the floating gate using achannel-hot-electron mechanism.
 35. The non-volatile memory system ofclaim 34, further comprising one or more input/output transistors, eachhaving a gate oxide layer, wherein the NMOS transistor and PMOScapacitor further include a gate oxide layer having a thicknesssubstantially the same as a thickness of the gate oxide layer of theinput/output transistors.